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On-chip replication of high-sag micro-optical components fabricated by direct laser writing

Author(s):
Asselin, D. ( INO (Canada) )
Topart, P. ( INO (Canada) )
Sheng, L. ( INO (Canada) )
Cayer, F. ( INO (Canada) )
Leclair, S. ( INO (Canada) )
Wang, M. ( INO (Canada) )
Jerominek, H. ( INO (Canada) )
2 more
Publication title:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5720
Pub. Year:
2005
Page(from):
222
Page(to):
232
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456946 [0819456942]
Language:
English
Call no.:
P63600/5720
Type:
Conference Proceedings

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