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Submicron sculpturing on chalcogenide films

Author(s):
Dror, R. ( Soreq Nuclear Research Ctr. (Israel) )
Feigel, A.I. ( Soreq Nuclear Research Ctr. (Israel) )
Veinguer, M. ( Soreq Nuclear Research Ctr. (Israel) )
Sfez, B.G. ( Soreq Nuclear Research Ctr. (Israel) )
Klebanov, M. ( Ben-Gurion Univ. of the Negev (Israel) )
Arsh, A. ( Ben-Gurion Univ. of the Negev (Israel) )
Lyubin, V. ( Ben-Gurion Univ. of the Negev (Israel) )
2 more
Publication title:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5720
Pub. Year:
2005
Page(from):
56
Page(to):
67
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456946 [0819456942]
Language:
English
Call no.:
P63600/5720
Type:
Conference Proceedings

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