Etching of micro- and nano-structures in semiconductor and glass material systems (Invited Paper)

Etching of micro- and nano-structures in semiconductor and glass material systems (Invited Paper)

Author(s):

Borek, G.T. ( MEMS Optical, Inc. (USA) )
Shafer, J.A. ( MEMS Optical, Inc. (USA) )
Simmons, L.R. ( MEMS Optical, Inc. (USA) )

Publication title:

Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5720

Pub. Year:

2005

Page(from):

36

Page(to):

47

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456946 [0819456942]

Language:

English

Call no.:

P63600/5720

Type:

Conference Proceedings

Details

TDL ID:	ZA00014937
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining Technology for Micro-Optics and Nano-Optics
Conf. info. (Number):	2005 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.25-2005.01.27

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