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Fabrication of three-dimensional photonic crystals with multilayer photolithography

Author(s):
Yao, P. ( Univ. of Delaware (USA) )
Schneider, G.J. ( Univ. of Delaware (USA) )
Miao, B. ( Univ. of Delaware (USA) )
Prather, D.W. ( Univ. of Delaware (USA) )
Wetzel, E.D. ( Army Research Lab. (USA) )
O'Brien, D.J. ( Army Research Lab. (USA) )
1 more
Publication title:
Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San JOse, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5720
Pub. date:
2005
Page(from):
27
Page(to):
35
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456946 [0819456942]
Language:
English
Call no.:
P63600/5720
Type:
Conference Proceedings

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