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Fabrication of microchannel using planar photolithography

Author(s):
Publication title:
Microfluidics, bioMEMS, and medical microsystems III : 24-26 January 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5718
Pub. Year:
2005
Page(from):
73
Page(to):
81
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456922 [0819456926]
Language:
English
Call no.:
P63600/5718
Type:
Conference Proceedings

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