Surface profiler for fixed through-glass measurement

Author(s):

Han, S. ( Veeco Instruments (USA) )

Novak, E. ( Veeco Instruments (USA) )

Wissinger, J. ( Veeco Instruments (USA) )

Guenther, B.W. ( Veeco Instruments (USA) )

Browne, T. ( Veeco Instruments (USA) )

Yanine, E. ( Veeco Instruments (USA) )

Schurig, M. ( Veeco Instruments (USA) )

Herron, J.D. ( Veeco Instruments (USA) )

McCloy, C. ( Veeco Instruments (USA) )

Li, X. ( Veeco Instruments (USA) )

Krell, M.B. ( Veeco Instruments (USA) )

Harris, J. ( Veeco Instruments (USA) )

7 more

Publication title:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5716

Pub. Year:

2005

Page(from):

189

Page(to):

197

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456908 [081945690X]

Language:

English

Call no.:

P63600/5716

Type:

Conference Proceedings