Blank Cover Image

Lifetime characterization of capacitive RF MEMS switches

Author(s):
  • Ziaei, A. ( Thales Research and Technology (France) )
  • Dean, T. ( Thales Research and Technology (France) )
  • Polizzi, J.-P. ( Thales Research and Technology (France) )
Publication title:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5716
Pub. Year:
2005
Page(from):
113
Page(to):
121
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456908 [081945690X]
Language:
English
Call no.:
P63600/5716
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Lifetime characterization of capacitive RF MEMS switches

Ziaei, A., Dean, T., Mancuso, Y.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Failure mechanisms of DC and capacitive RF MEMS switches (Invited Paper) [6111-17]

Patton, S. T., Zabinski, J. S.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Lifetime characterization of capacitive power RF MEMS switches [6172-20]

Ziaei, A, Dean, T., Mancuso, Y.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Influence of ion implantation on dielectric charging in capacitive RF MEMS switches

G. Li, L. Zhan, H. San, P. Xu, X. Chen

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Lifetime characterization of powercapacitive RF MEMS switches

A. Ziaei

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

L. Zhan, H. San, G. Li, P. Xu, X. Chen

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Design and fabrication of low-loss RF MEMS switches for a broadband reflectarray

Ziaei, A., Dean, T., Charrier, M., Bondavalli, P., Polizzi, J.-P., Legay, H., Pinte, B., Girard, E., Gillard, R.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Development of an amorphous diamond (a-D) RF MEMS switch

Webster, J.R., Dyck, C.W., Friedmann, T.A., Sullivan, J.P., Nordquist, C.D., Carton, A.J., Kraus, G.M., Schmidt, G.D.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Performance improvement of rf MEMS capacitive switches with high-dielectric-constant materials

Yoon,H., Sha,Y., Sharma,P.K., Vinoy,K.J., Varadan,V.K., Varadan,V.V.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Capacitive rf MEMS switch with composite beam

Miao, M., Xiao, Z.Y., Wu, G.Y., Hao, Y.L., Zhang, H.X.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Fabrication and characterization of ohmic contacting RF MEMS switches

Dyck, C.W., Plut, T.A., Nordquist, C.D., Finnegan, P.S., Austin, F., Reines, I.C., Goldsmith, C.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Understanding and improving longevity in RF MEMS capacitive switches

C. Goldsmith, D. Forehand, D. Scarbrough, Z. Peng, C. Palego

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12