Design and fabrication of giant micromirrors using electroplating-based technology

Design and fabrication of giant micromirrors using electroplating-based technology

Author(s):

Ilias, S. ( INO (Canada) )
Topart, P.A. ( INO (Canada) )
Larouche, C. ( INO (Canada) )
Leclair, S. ( INO (Canada) )
Jerominek, H. ( INO (Canada) )

Publication title:

Micromachining and Microfabrication Process Technology X

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5715

Pub. Year:

2005

Page(from):

190

Page(to):

199

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456892 [0819456896]

Language:

English

Call no.:

P63600/5715

Type:

Conference Proceedings

Details

TDL ID:	ZA00014932
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	2005 : 10th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2005.01.25-2005.01.27

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