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Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair (invited Paper)

Author(s):
  • Haight, R. ( IBM Thomas J. Watson Research Ctr. (USA) )
  • Wagner, A. ( IBM Thomas J. Watson Research Ctr. (USA) )
  • Longo, P. ( IBM Thomas J. Watson Research Ctr. (USA) )
  • Lim, D. ( IBM Thomas J. Watson Research Ctr. (USA) )
Publication title:
Commercial and biomedical applications of ultrafast lasers V : 24-27 January, 2005, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5714
Pub. Year:
2005
Page(from):
24
Page(to):
36
Pages:
13
Pub. info.:
Bellingham, Was.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456885 [0819456888]
Language:
English
Call no.:
P63600/5714
Type:
Conference Proceedings

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