Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair (invited Paper)
- Author(s):
- Haight, R. ( IBM Thomas J. Watson Research Ctr. (USA) )
- Wagner, A. ( IBM Thomas J. Watson Research Ctr. (USA) )
- Longo, P. ( IBM Thomas J. Watson Research Ctr. (USA) )
- Lim, D. ( IBM Thomas J. Watson Research Ctr. (USA) )
- Publication title:
- Commercial and biomedical applications of ultrafast lasers V : 24-27 January, 2005, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5714
- Pub. Year:
- 2005
- Page(from):
- 24
- Page(to):
- 36
- Pages:
- 13
- Pub. info.:
- Bellingham, Was.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456885 [0819456888]
- Language:
- English
- Call no.:
- P63600/5714
- Type:
- Conference Proceedings
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