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Improved near-infrared luminescence of Si-rich SiO2 with buried SI nanocrystals grown by PECVD at optimized N20 fluence

Author(s):
Chen, C.-Y. ( National Chiao Tung Univ. (Taiwan) )
Lin, C.-J. ( National Chiao Tung Univ. (Taiwan) )
Kuo, H.-C. ( National Chiao Tung Univ. (Taiwan) )
Lin, G.-R. ( National Chiao Tung Univ. (Taiwan) )
Chueh, Y.-L. ( National Tsing Hua Univ. (Taiwan) )
Chou, L.-J. ( National Tsing Hua Univ. (Taiwan) )
Chang, C.-W. ( National Chiao Tung Univ. (Taiwan) )
Diau, E.W.-G. ( National Chiao Tung Univ. (Taiwan) )
3 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
592
Page(to):
599
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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