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Particle-free semiconductor cutting using the water jet guided laser

Author(s):
Perrottet, D. ( Synova SA (Switzerland) )
Spiegel, A. ( Synova SA (Switzerland) )
Wagner, F. ( Synova SA (Switzerland) )
Housh, R. ( Synova SA (Switzerland) )
Richerzhagen, B. ( Synova SA (Switzerland) )
Manley, J. ( Synova-USA Inc. (USA) )
1 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
240
Page(to):
246
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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