Particle-free semiconductor cutting using the water jet guided laser
- Author(s):
Perrottet, D. ( Synova SA (Switzerland) ) Spiegel, A. ( Synova SA (Switzerland) ) Wagner, F. ( Synova SA (Switzerland) ) Housh, R. ( Synova SA (Switzerland) ) Richerzhagen, B. ( Synova SA (Switzerland) ) Manley, J. ( Synova-USA Inc. (USA) ) - Publication title:
- Photon Processing in Microelectronics and Photonics IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5713
- Pub. Year:
- 2005
- Page(from):
- 240
- Page(to):
- 246
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456878 [081945687X]
- Language:
- English
- Call no.:
- P63600/5713
- Type:
- Conference Proceedings
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