Investigation of the process for manufacturing optoelectronic devices using nonorganic photoresists
- Author(s):
Kostyukevych, S.A. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) ) Kryuchin, A.A. ( Institute for Information Recording (Ukraine) ) Morozovska, A.N. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) ) Petrov, V.V. ( Institute for Information Recording (Ukraine) ) Shepeliavyi, P.E. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) ) Kostyukevich, E.V. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) ) Tverdokhleb, I.V. ( Specialized Enterprise Holography Ltd. (Ukraine) ) - Publication title:
- Photon Processing in Microelectronics and Photonics IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5713
- Pub. Year:
- 2005
- Page(from):
- 43
- Page(to):
- 53
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456878 [081945687X]
- Language:
- English
- Call no.:
- P63600/5713
- Type:
- Conference Proceedings
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