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Investigation of the process for manufacturing optoelectronic devices using nonorganic photoresists

Author(s):
Kostyukevych, S.A. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) )
Kryuchin, A.A. ( Institute for Information Recording (Ukraine) )
Morozovska, A.N. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) )
Petrov, V.V. ( Institute for Information Recording (Ukraine) )
Shepeliavyi, P.E. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) )
Kostyukevich, E.V. ( V. Lashkaryov Institute of Semiconductor Physics (Ukraine) )
Tverdokhleb, I.V. ( Specialized Enterprise Holography Ltd. (Ukraine) )
2 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. date:
2005
Page(from):
43
Page(to):
53
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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