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Micromachining of inorganic transparent materials using pulsed laser plasma soft x-rays at 10 nm (Invited Paper)

Author(s):
Makimura, T. ( Univ. of Tsukuba (Japan) )
Kenmotsu, Y. ( Univ. of Tsukuba (Japan) )
Miyamoto, H. ( Univ. of Tsukuba (Japan) )
Uchida, S. ( Univ. of Tsukuba (Japan) )
Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Murakami, K. ( Univ. of Tsukuba (Japan) )
1 more
Publication title:
Photon Processing in Microelectronics and Photonics IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5713
Pub. Year:
2005
Page(from):
9
Page(to):
20
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456878 [081945687X]
Language:
English
Call no.:
P63600/5713
Type:
Conference Proceedings

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