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Formation of self-organized regular nanostructures upon femtosecond laser ablation

Author(s):
Reif, J. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) )
Costache, F. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) )
Eckert, S. ( Brandenburgische Technische Univ. Cottbus(Germany) )
Kouteva-Arguirova, S. ( Brandenburgische Technische Univ. Cottbus(Germany), IHP/BTU Jointlab(Germany) )
Bestehorn, M. ( Brandenburgische Technische Univ. Cottbus(Germany) )
Georgescu, I. ( Max-Planck Institut fur Physik komplexer Systeme(Germany) )
Semerok, A. F. ( CEA Saclay(France) )
Martin, P. ( CEA Saclay(France) )
Gobert, O. ( CEA Saclay(France) )
Seifert, W. ( IHP/BTU Jointlab(Germany), Innovations for High Performance Microelectronics(Germany) )
5 more
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
737
Page(to):
742
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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