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Low resistivity glass metallization by laser induced plasma-assisted ablation(LIPAA)

Author(s):
Hong, M. H. ( Data Storage Institute(Singapore), National Univ. of Singapore(Singapore) )
Xie, Q. ( Data Storage Institute(Singapore) )
Lim, B. C. ( National Univ. of Singapore(Singapore) )
Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) )
Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) )
Ye, K. D. ( Data Storage Institute(Singapore) )
Shi, L. P. ( Data Storage Institute(Singapore) )
Chong, T. C. ( Data Storage Institute(Singapore), National Univ. of Singapore(Singapore) )
3 more
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
532
Page(to):
537
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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