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Micromachining of transparent materials by laser-induced plasma-assisted ablation(LIPAA)(LPM 2004 Student Paper Award: Oral)

Author(s):
Hanada, Y. ( RIKEN-The Institute of Physical and Chemical Research(Japan), Tokyo Univ. of Science(Japan) )
Sugioka, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan), Tokyo Univ. of Science(Japan) )
Obata, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) )
Takase, H. ( Tokyo Denki Univ. (Japan) )
Takai, H. ( Tokyo Denki Univ. (Japan) )
Miyamoto, Iwao ( Tokyo Univ. of Science(Japan) )
Midorikawa, K. ( RIKEN-The Institute of Physical and Chemical Research(Japan) )
2 more
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
526
Page(to):
531
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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