Performance of liquid xenon jet laser-produced-plasma light source for EUV lithography
- Author(s):
- Suganuma, T. ( Extreme Ultraviolet Lithography System Development Association(Japan) )
- Abe, T. ( Extreme Ultraviolet Lithography System Development Association(Japan) )
- Komori, H. ( Extreme Ultraviolet Lithography System Development Association(Japan) )
- Takabayashi, Y. ( Extreme Ultraviolet Lithography System Development Association(Japan) )
- Endo, A. ( Extreme Ultraviolet Lithography System Development Association(Japan) )
- Publication title:
- Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5662
- Pub. Year:
- 2004
- Page(from):
- 367
- Page(to):
- 372
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456236 [0819456233]
- Language:
- English
- Call no.:
- P63600/5662
- Type:
- Conference Proceedings
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