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Nanomachining of inorganic transparent materials using an x-ray exciton method

Author(s):
Makimura, T. ( Univ. of Tsukuba(Japan) )
Kenmotsu, Y. ( Univ. of Tsukuba(Japan) )
Miyamoto, H. ( Univ. of Tsukuba(Japan) )
Mori, M. ( Japan Atomic Energy Research Institute(Japan) )
Kondo, K. ( Osaka Univ. (Japan) )
Murakami, K. ( Univ. of Tsukuba(Japan) )
1 more
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
107
Page(to):
112
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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