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Surface micro-structuring of silica glass by laser-induced backside wet etching using ns-pulsed UV lasers: application into micropatterning of functional materials using self-assembled monolayers

Author(s):
Niino, H. ( National Institute of Advanced Industrial Science and Technology(Japan) )
Ding, X. ( National Institute of Advanced Industrial Science and Technology(Japan) )
Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology(Japan) )
Sato, T. ( National Institute of Advanced Industrial Science and Technology(Japan) )
Narazaki, A. ( National Institute of Advanced Industrial Science and Technology(Japan) )
Kurosaki, R. ( National Institute of Advanced Industrial Science and Technology(Japan) )
1 more
Publication title:
Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5662
Pub. Year:
2004
Page(from):
18
Page(to):
23
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456236 [0819456233]
Language:
English
Call no.:
P63600/5662
Type:
Conference Proceedings

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