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Plastic thermally controllable platform with integrated thin film microcomponents

Author(s):
Lee, D.-S. ( Electronics and Telecommunications Research Institute (South Korea) )
Chung, K.-H. ( Electronics and Telecommunications Research Institute (South Korea) )
Yang, H. ( Electronics and Telecommunications Research Institute (South Korea) )
Park, S. H. ( Electronics and Telecommunications Research Institute (South Korea) )
Kim, S.-J. ( Electronics and Telecommunications Research Institute (South Korea) )
Pyo, H.-B. ( Electronics and Telecommunications Research Institute (South Korea) )
1 more
Publication title:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5650
Pub. date:
2004
Page(from):
429
Page(to):
437
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456106 [0819456101]
Language:
English
Call no.:
P63600/5650
Type:
Conference Proceedings

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