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100-nm-scale electroplated nickel stamper fabricated by e-beam lithography on chrome/quartz mask

Author(s):
Choi, D.-S. ( Karea Institute of Machinery and Materials (South Karea) )
Yoo, Y.-E. ( Karea Institute of Machinery and Materials (South Karea) )
Seo, Y. H. ( Karea Institute of Machinery and Materials (South Karea) )
Lee, J.-H. ( Karea Institute of Machinery and Materials (South Karea) )
Je, T.-J. ( Karea Institute of Machinery and Materials (South Karea) )
Whang, K.-H. ( Karea Institute of Machinery and Materials (South Karea) )
1 more
Publication title:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5650
Pub. Year:
2004
Page(from):
324
Page(to):
327
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456106 [0819456101]
Language:
English
Call no.:
P63600/5650
Type:
Conference Proceedings

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