100-nm-scale electroplated nickel stamper fabricated by e-beam lithography on chrome/quartz mask
- Author(s):
Choi, D.-S. ( Karea Institute of Machinery and Materials (South Karea) ) Yoo, Y.-E. ( Karea Institute of Machinery and Materials (South Karea) ) Seo, Y. H. ( Karea Institute of Machinery and Materials (South Karea) ) Lee, J.-H. ( Karea Institute of Machinery and Materials (South Karea) ) Je, T.-J. ( Karea Institute of Machinery and Materials (South Karea) ) Whang, K.-H. ( Karea Institute of Machinery and Materials (South Karea) ) - Publication title:
- Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5650
- Pub. Year:
- 2004
- Page(from):
- 324
- Page(to):
- 327
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456106 [0819456101]
- Language:
- English
- Call no.:
- P63600/5650
- Type:
- Conference Proceedings
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