Polygon microlens array design and fabrication using thermal pressing in LIGA-like process

Author(s):

• Shyu, R. F. ( National Huwei Univ. of Science and Technology (Taiwan) )
• Yang, H. ( National Chung Hsing Univ. (Taiwan) )
• Ho, C.-T. ( National Huwei Univ. of Science and Technology (Taiwan) )
• Hsieh, W.-H. ( National Huwei Univ. of Science and Technology (Taiwan) )
• Weng, F.-T. ( National Huwei Univ. of Science and Technology (Taiwan) )

Publication title:

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5650

Pub. Year:

2004

Page(from):

305

Page(to):

312

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456106 [0819456101]

Language:

English

Call no.:

P63600/5650

Type:

Conference Proceedings