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Fabrication of PZT microdevices using a high-yield sol-gel process

Author(s):
  • Hu, M. ( Univ. Freiburg (Germany) )
  • Du, H. ( Nanyang Technological Univ. (Singapore) )
  • Xie, J. ( Nanyang Technological Univ. (Singapore) )
  • Ling, S.-F. ( Nanyang Technological Univ. (Singapore) )
  • Fu, Y. ( Univ. of Cambridge (United Kingdom) )
Publication title:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5650
Pub. Year:
2004
Page(from):
180
Page(to):
188
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456106 [0819456101]
Language:
English
Call no.:
P63600/5650
Type:
Conference Proceedings

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