Optimization of single keV ion implantation for the construction of single P-donor devices

Optimization of single keV ion implantation for the construction of single P-donor devices

Author(s):

Yang, C. ( Univ. of Melbourne (Australia) )

Jamieson, D. N. ( Univ. of Melbourne (Australia) )

Hopt, T. ( Univ. of Melbourne (Australia) )

Andresen, S. E. ( Univ. of New South Wales (Australia) )

Hearne, S. M. ( Univ. of Melbourne (Australia) )

Hudson, F. E. ( Univ. of New South Wales (Australia) )

Pakes, C. I. ( Univ. of Melbourne (Australia) )

Mitic, M. ( Univ. of New South Wales (Australia) )

Gauja, E. ( Univ. of New South Wales (Australia) )

Tamanyan, G. ( Univ. of Melbourne (Australia) )

Dzurak, A. S. ( Univ. of New South Wales (Australia) )

Prawer, S. ( Univ. of Melbourne (Australia) )

Clark, R. G. ( Univ. of New South Wales (Australia) )

8 more

Publication title:

Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5650

Pub. Year:

2004

Page(from):

64

Page(to):

71

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456106 [0819456101]

Language:

English

Call no.:

P63600/5650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014867
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Micro- and Nanotechnology
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Sydney, Australia
Conf. info. (Date):	2004.12.13-2004.12.15

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