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Micromirror structure based on TiNi shape memory thin films

Author(s):
Fu, Y. Q. ( Singapore-Massachusetts Institute of Technology Alliance (Singapore) and Univ. of Cambridge (United Kingdom) )
Hu, M. ( Nanyang Technological Univ. (Singapore) )
Du, H. ( Singapore-Massachusetts Institute of Technology Alliance (Singapore) and Nanyang Technological Univ. (Singapore) )
Luo, J. ( Univ. of Cambridge (United Kingdom) )
Flewitt, A. J. ( Univ. of Cambridge (United Kingdom) )
Milne, W. I. ( Univ. of Cambridge (United Kingdom) )
1 more
Publication title:
Smart structures, devices, and systems II : 13-15 December 2004, Sydney, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5649
Pub. Year:
2004
Page(from):
145
Page(to):
153
Pages:
9
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456090 [0819456098]
Language:
English
Call no.:
P63600/5649-1
Type:
Conference Proceedings

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