Blank Cover Image

Study on ion etching technology of infrared antireflection subwavelength relief structure

Author(s):
  • Dong, L. ( Changchun Univ. of Science and Technology (China) )
  • Dong, Y. ( Changchun Univ. of Science and Technology (China) )
  • Sun, Y. ( Changchun Univ. of Science and Technology (China) )
Publication title:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
Pub. Year:
2004
Page(from):
334
Page(to):
338
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456007 [0819456004]
Language:
English
Call no.:
P63600/5645
Type:
Conference Proceedings

Similar Items:

W. Tan, C. Lu, Z. Xu, Y. Ni

Society of Photo-optical Instrumentation Engineers

D. W. Peters, L. I. Basilio, H. Loui

SPIE - The International Society of Optical Engineering

Kanamori, Y., Ishimori, M., Hane, K.

SPIE-The International Society for Optical Engineering

Omori,S., Okano,M., Toyota,H.

SPIE-The International Society for Optical Engineering

Y. Sun, L. Dong, Y. Leng

Society of Photo-optical Instrumentation Engineers

Dubreuil,D., Harvey,E.C., Pigot,C., Rizvi,N.H.

SPIE-The International Society for Optical Engineering

Dong L., Fu X., Dong Y., Sun Y.

SPIE - The International Society of Optical Engineering

C. Sun, J. Wang, Z. Hao, B. Xiong, Y. Luo

Electrochemical Society

Kanamori,Y., Sasaki,M., Hane,K.

SPIE - The International Society for Optical Engineering

Dong, L., Dong, Y., Sun, Y.

SPIE - The International Society of Optical Engineering

V. N. Petryakov, A. Y. Klimov, B. A. Gribkov, S. M. Olaizola, Y. K. Verevkin

SPIE - The International Society of Optical Engineering

Quan, M. Y., Zhan, L., Sun, G., Luo, S. Y., Ye, Q. H., Xia, Y.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12