ArF immersion lithography using TWINSCAN technology

ArF immersion lithography using TWINSCAN technology

Author(s):

Mulkens, J. ( ASML Netherlands B.V. (Netherlands) )
Streefkerk, B. ( ASML Netherlands B.V. (Netherlands) )
Haagendorp, M. ( ASML Netherlands B.V. (Netherlands) )

Publication title:

Advanced microlithography technologies : 8-10 November, 2004, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5645

Pub. Year:

2004

Page(from):

196

Page(to):

207

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819456007 [0819456004]

Language:

English

Call no.:

P63600/5645

Type:

Conference Proceedings

Details

TDL ID:	ZA00014861
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Advanced microlithography technologies
Conf. info. (Number):	2004
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.08-2004.11.10

Similar Items:

1 Conference Proceedings Extending optical lithography with immersion Streefkerk, B., Baselmans, J., Gehoel-van Ansem, W., Mulkens, J., Hoogendam, C., Hoogendorp, M., Flagello, D.G., Sewell, … SPIE - The International Society of Optical Engineering	7 Conference Proceedings High-n immersion lithography H. Sewell, J. Mulkens, P. Graeupner, D. McCafferty, L. Markoya Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings The next phase for immersion lithography [6154-06] Sewell, H., Mulkens, J., McCafferty, D., Markoya, L., Streefkerk, B., Graeupner, P. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Optical lithography with 157-nm technology Modderman, T.M., Jasper, H., Boom, H., Uitterdijk, T., Dana, S., Sewell, H., O'Neil, T.K., Mulkens, J., Brunotte, M., … SPIE - The International Society of Optical Engineering
3 Conference Proceedings Defects, overlay, and focus performance improvements with five generations of immersion exposure systems J. Mulkens, B. Streefkerk, H. Jasper, J. de Klerk, F. de Jong, L. Levasier, M. Leenders SPIE - The International Society of Optical Engineering	9 Conference Proceedings ArF lithography options for 100-nm technologies Vandenberghe,G.N., Kim,Y.-C., Delvaux,C., Lucas,K.D., Choi,S.-J., Ercken,M., Ronse,K., Vleeming,B. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Immersion lithography exposure systems: today's capabilities and tomorrow's expectations Jan Mulkens, Bob Streefkerk, Martin Hoogendorp, Richard Moerman, Martijn Leenders, Fred de Jong, Marco Stavenga, Herman … SPIE - The International Society of Optical Engineering	10 Conference Proceedings RET masks for petterning 45nm node contact hole using ArF immersion lithography [6283-114] Hsu, M., Chen, F. J., Van Den Broeke, D., En Tszng, S., Shieh, J., Hsu, S., Shi, X. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Characterization of ArF immersion process for production (Invited Paper) Kohler, C., de Boeij, W., van Ingen-Schenau, K., van de Kerkhof, M., de Klerk, J., Kok, H., Swinkels, G., Finders, J., … SPIE - The International Society of Optical Engineering	11 Conference Proceedings Organic ArF bottom anti-reflective coatings for immersion lithography Z. Xiang, H. Zhuang, H. Wu, J. Shan, D. Abdallah, J. Yin, S. Mullen, H. Yao, E. Gonzalez, M. Neisser SPIE - The International Society of Optical Engineering
6 Conference Proceedings Immersion lithography with an ultrahigh-NA in-line catadioptric lens and a high-transmission flexible polarization illumination system [6154-69] Jasper, H., Modderman, T., Van de Kerkhof, M., Wagner, C., Mulkens, J., De. Bodij, W., Van Seten, E, Kneer, B. SPIE - The International Society of Optical Engineering	12 Conference Proceedings ArF step-and-scan exposure system for 0.15-ｦﾌm and 0.13-ｦﾌm technology nodes Mulkens,J., Stoeldraijer,J.M., Davies,G., Dierichs,M., Heskamp,B., Moers,M.H., George,R.A., Roempp,O., Glatzel,H., … SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12