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A new method to determine the energy range for the FOCAL technique

Author(s):
Zhang, D. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Wang, X. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Shi, W. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Wang, F. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Guo, L. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Hu, J. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
Ma, M. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
He, L. ( Shanghai Institute of Optics and Fine Mechanics, CAS (China) )
3 more
Publication title:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
Pub. Year:
2004
Page(from):
180
Page(to):
187
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819456007 [0819456004]
Language:
English
Call no.:
P63600/5645
Type:
Conference Proceedings

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