Development of automatic OPC treatment and layout decomposition for double dipole lithography for low-k1 imaging
- Author(s):
- Chiou, T.-B. ( ASML Taiwan Ltd. (Taiwan, China) )
- Chen, A. C. ( ASML Taiwan Ltd. (Taiwan, China) )
- Hsu, S. D. ( ASML MaskTools, Inc.(USA) )
- Eurlings, M. ( ASML Netherlands B.V. (Netherlands) )
- Hendrickx, E. ( IMEC (Belgium) )
- Publication title:
- Advanced microlithography technologies : 8-10 November, 2004, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5645
- Pub. Year:
- 2004
- Page(from):
- 21
- Page(to):
- 31
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819456007 [0819456004]
- Language:
- English
- Call no.:
- P63600/5645
- Type:
- Conference Proceedings
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