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Fabrication and application of a novel freestanding stencil bi-material cantilever structure

Author(s):
Wang, W. ( Institute of Microelectronics, CAS (China) )
Chen, D. ( Institute of Microelectronics, CAS (China) )
Ye, T. ( Institute of Microelectronics, CAS (China) )
Pan, L. ( Univ. of Science and Technology of China (China) )
Zhang, Q. ( Univ. of Science and Technology of China (China) )
Wu, X. ( Univ. of Science and Technology of China (China) )
1 more
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
309
Page(to):
315
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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