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Design of electrostatically levitated micromachined rotational gyroscope based on UV-LIGA technology

Author(s):
  • Gui, F. ( Shanghai Jiaotong Univ. (China) )
  • Chen, W. ( Shanghai Jiaotong Univ. (China) )
  • Su, Y. ( Shanghai Jiaotong Univ. (China) )
  • Zhang, W. ( Shanghai Jiaotong Univ. (China) )
  • Zhao, X. ( Shanghai Jiaotong Univ. (China) )
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. Year:
2004
Page(from):
264
Page(to):
275
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

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