Blank Cover Image

The microfabrication using powder materials with excimer laser (Invited Paper)

Author(s):
  • Chen, J. ( Beijing Univ. of Technology (China) )
  • Yue, C. ( Beijing Univ. of Technology (China) )
  • Zhang, Y. ( Beijing Univ. of Technology (China) )
  • Wang, X. ( Beijing Univ. of Technology (China) )
  • Zuo, T. ( Beijing Univ. of Technology (China) )
Publication title:
MEMS/MOEMS Technologies and Applications II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5641
Pub. date:
2004
Page(from):
205
Page(to):
210
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455963 [0819455962]
Language:
English
Call no.:
P63600/5641
Type:
Conference Proceedings

Similar Items:

Yue, C., Chen, J., Zuo, T.

SPIE - The International Society of Optical Engineering

Zuo,T., Chen,T., Li,C.

SPIE-The International Society for Optical Engineering

Chen, J., Wang, X., Zuo, T.

SPIE-The International Society for Optical Engineering

Liu, J., Zhao, X., Yi, A., Zhang, Y., Yu, L., Ma, L., Huang, K., Tang, Y., Huang, X., Huang, C., Qian, H., Hua, H., An, …

SPIE - The International Society of Optical Engineering

Chen, J., Wang, X., Yue, C., Zuo, T.

SPIE - The International Society of Optical Engineering

Yabe,A., Wang,J., Nino,H.

SPIE-The International Society for Optical Engineering

Chen, T., Chen, J.M., Zhang, Y., Ying, B.H., Jing, T., Zuo, T.C.

SPIE-The International Society for Optical Engineering

Chen, J.M., Chen, T., Wang, X.B., Zuo, T.C.

SPIE-The International Society for Optical Engineering

X. Liu, T. Chen, T. Zuo

Society of Photo-optical Instrumentation Engineers

Chen,D., Zhang,D., Ding,G., Zhao,X., Zhang,J., Yang,C., Cai,B.

SPIE - The International Society for Optical Engineering

Chen,W., Zhang,X., Bao,J., Wang,Y., Li,T., Jiang,P., Zhang,H.

SPIE-The International Society for Optical Engineering

Williams,S.W., Marsden,P.J., Roberts,N.C., Sidhu,J., Venables,M.A.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12