A high-g overload-protected accelerometer with a novel microstructure
- Author(s):
Chen, W. ( Harbin Institute of Technology (China) ) Wang, W. ( China Electronics Technology Group Corp. (China) ) Tian, L. ( China Electronics Technology Group Corp. (China) ) Liu, X. ( Harbin Institute of Technology (China) ) Huo, M. ( Harbin Institute of Technology (China) ) Zhang, R. ( Harbin Institute of Technology (China) ) Zhang, D. ( Harbin Institute of Technology (China) ) - Publication title:
- MEMS/MOEMS Technologies and Applications II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5641
- Pub. Year:
- 2004
- Page(from):
- 82
- Page(to):
- 86
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455963 [0819455962]
- Language:
- English
- Call no.:
- P63600/5641
- Type:
- Conference Proceedings
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