The study on the compound x-ray refractive lens using LIGA technique

The study on the compound x-ray refractive lens using LIGA technique

Author(s):

Liang, J. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Le, Z. ( Zhejiang Univ. of Technology (China) )

Peng, L ( Institute of High Energy Physics, CAS (China) )

Wang, W. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Lan, W. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Ming, A. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Yi, F. ( Institute of High Energy Physics, CAS (China) )

Ye, J. ( Zhejiang Univ. of Technology (China) )

Quan, B. ( Zhejiang Univ. of Technology (China) )

Yao, J. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Xuan, M. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

Wang, L. ( Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China) )

7 more

Publication title:

MEMS/MOEMS Technologies and Applications II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5641

Pub. Year:

2004

Page(from):

48

Page(to):

55

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455963 [0819455962]

Language:

English

Call no.:

P63600/5641

Type:

Conference Proceedings

Details

TDL ID:	ZA00014856
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : MEMS/MOEMS Technologies and Applications
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.10-2004.11.12

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