An instrument for surface roughness measurement of optical thin films
- Author(s):
- Publication title:
- Optical design and testing II : 8-12 November 2004, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5638
- Pub. Year:
- 2004
- Page(from):
- 638
- Page(to):
- 641
- Pages:
- 4
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455932 [0819455938]
- Language:
- English
- Call no.:
- P63600/5638-2
- Type:
- Conference Proceedings
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