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Experimental research on thickness-monitoring techniques of non-quarter films

Author(s):
  • Zhang, X. ( Naval Univ. of Engineering (China) )
  • Gao, X. ( Naval Univ. of Engineering (China) )
  • Rao, J. ( Naval Univ. of Engineering (China) )
Publication title:
Optical design and testing II : 8-12 November 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5638
Pub. Year:
2004
Page(from):
412
Page(to):
417
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455932 [0819455938]
Language:
English
Call no.:
P63600/5638-1
Type:
Conference Proceedings

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