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Study on the characteristics of multilayer dielectric grating mask profile by the RCW method

Author(s):
Publication title:
Holography, diffractive optics, and applications II : 8-11 November 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5636
Pub. Year:
2004
Page(from):
101
Page(to):
108
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455918 [0819455911]
Language:
English
Call no.:
P63600/5636-1
Type:
Conference Proceedings

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