Present state and development of nanometrology

Present state and development of nanometrology

Author(s):

Huang, Y. ( China JiLiang Univ. (China) )
Zhu, R. ( China JiLiang Univ. (China) )
Dai, B. ( China JiLiang Univ. (China) )

Publication title:

Nanophotonics, Nanostructure, and Nanometrology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5635

Pub. Year:

2004

Page(from):

486

Page(to):

492

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455901 [0819455903]

Language:

English

Call no.:

P63600/5635

Type:

Conference Proceedings

Details

TDL ID:	ZA00014848
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Nanophotonics, Nanostructure, and Nanometrology
Conf. info. (Number):	2004
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.08-2004.11.10

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