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Helicon wave plasma chemical vapor deposition of nanocrystalline silicon carbide films at low substrate temperature

Author(s):
Publication title:
Nanophotonics, Nanostructure, and Nanometrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5635
Pub. date:
2004
Page(from):
410
Page(to):
413
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455901 [0819455903]
Language:
English
Call no.:
P63600/5635
Type:
Conference Proceedings

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