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Measurement of opaque film's surface profile by broadband-light interference methods

Author(s):
  • Zhu, Y. ( Xi'an Jiaotong Univ. (China) )
  • Sun, Y. ( Engineering Univ. of Air Force (China) )
  • Zhao, H. ( Xi'an Jiaotong Univ. (China) )
  • Zhao, W. ( Xi'an Jiaotong Univ. (China) )
Publication title:
Advanced sensor systems and applications II : 8-12 November 2004, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5634
Pub. Year:
2004
Page(from):
733
Page(to):
738
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455895 [081945589X]
Language:
English
Call no.:
P63600/5634-2
Type:
Conference Proceedings

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