One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

Author(s):

Shinozaki, R. ( Core System Co., Ltd. (Japan) )
Sasaki, O. ( Niigata Univ. (Japan) )
Suzuki, T. ( Niigata Univ. (Japan) )

Publication title:

Advanced materials and devices for sensing and imaging II : 8-10 November 2004, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5633

Pub. Year:

2004

Page(from):

31

Page(to):

39

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455888 [0819455881]

Language:

English

Call no.:

P63600/5633

Type:

Conference Proceedings

Details

TDL ID:	ZA00014845
Series ID:	PA00000029
Conf. info. (Name):	Photonics Asia : Advanced Materials and Devices for Sensing and Imaging
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.08-2004.11.10

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