Silicon microstructuring using ultrashort laser pulses
- Author(s):
Zhu, J. ( Fudan Univ. (China) ) Li, W. ( The Chinese Univ. of Hong Kong (Hong Kong China) ) Zhao, M. ( Fudan Univ. (China) ) Yin, G. ( Fudan Univ. (China) ) Chen, X. ( Fudan Univ. (China) ) Chen, D. ( Harbin Institute of Technology (China) ) Zhao, L. ( Fudan Univ. (China) ) - Publication title:
- Lasers in Material Processing and Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5629
- Pub. Year:
- 2004
- Page(from):
- 276
- Page(to):
- 283
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819455840 [0819455849]
- Language:
- English
- Call no.:
- P63600/5629
- Type:
- Conference Proceedings
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