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Applications of ICP in optoelectronic device fabrication

Author(s):
Gan, Y. ( Accelink Technologies Co., Ltd (China) )
Zhang, J. ( Accelink Technologies Co., Ltd (China) )
Jiang, S. ( Accelink Technologies Co., Ltd (China) )
Huang, X. ( Accelink Technologies Co., Ltd (China) )
Zhou, N. ( Accelink Technologies Co., Ltd (China) )
Deng, L. ( Oxford Instruments Plasma Technology (United Kingdom) )
1 more
Publication title:
Semiconductor and Organic Optoelectronic Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5624
Pub. Year:
2000
Page(from):
152
Page(to):
160
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455789 [0819455784]
Language:
English
Call no.:
P63600/5624
Type:
Conference Proceedings

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