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Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch

Author(s):
Yin, D. ( Peking Univ. (China) )
Lin, J. ( Peking Univ. (China) )
Chen, Q. ( Peking Univ. (China) )
Chen, Z. ( Peking Univ. (China) )
Xu, A. ( Peking Univ. (China) )
Wu, W. ( Peking Univ. (China) )
1 more
Publication title:
Semiconductor and Organic Optoelectronic Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5624
Pub. Year:
2000
Page(from):
604
Page(to):
609
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455789 [0819455784]
Language:
English
Call no.:
P63600/5624
Type:
Conference Proceedings

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