Hybrid integration technologies for optical micro-systems (Invited Paper)

Hybrid integration technologies for optical micro-systems (Invited Paper)

Author(s):

Higurashi, E. ( Univ. of Tokyo (Japan) )
Itoh, T. ( Univ. of Tokyo (Japan) )
Suga, T. ( Univ. of Tokyo (Japan) )
Sawada, R. ( Kyushu Univ. (Japan) )

Publication title:

Optomechatronic Micro/Nano Components, Devices, and Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5604

Pub. date:

2004

Page(from):

67

Page(to):

73

Pages:

7

Pub. info.:

SPIE - The International Society of Optical Engineering

ISSN:

0277768X

ISBN:

9780819455574 [0819455571]

Language:

English

Call no.:

P63600/5604

Type:

Conference Proceedings

Details

TDL ID:	ZA00014810
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Optomechatronic Micro/Nano Components, Devices, and Systems
Conf. info. (Number):	2004
Conf. info. (Venue):	Philadelphia, PA, USA
Conf. info. (Date):	2004.10.27-2004.10.28

Similar Items:

1 Conference Proceedings Low-temperature bonding of a LiNbO3 waveguide chip to a Si substrate in ambient air for hybrid-integrated optical devices [6376-02] Takigawa, R., Higurashi, E., Suga, T., Shinada, S., Kawanishi, T. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Integration of polymeric micro-optical elements with planar waveguiding circuits (Invited Paper) Eldada,L.A., Yardley,J.T. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Hollow Waveguide Hybrid Integration Technology for Micro-optical Systems R. M. Jenkins ESA Publications Division	8 Conference Proceedings Replication technology for micro-optics and optical microsystems (Invited Paper) Gale, M.T. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Hybrid micro-optical system integration by laserbeam soldering E. Beckert, R. Eberhardt, H. Banse, A. Tunnermann, F. Buchmann, M. Fettke SPIE - The International Society of Optical Engineering	9 Conference Proceedings Room temperature GaN-GaAs direct bonding by argon-beam surface activation E. Higurashi, Y. Tokuda, M. Akaike, T. Suga Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Recent advances in PLC hybrid integration technology (Invited Paper) Ogawa, I., Kitagawa, T. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Sequential Activation Process of oxygen RIE and nitrogen Radical for LiTaO₃ and Si Wafer Bonding Y. Zikuhara, E. Higurashi, N. Tamura, T. Suga Electrochemical Society
5 Conference Proceedings Low Temperature Bonding for Optical Microsystems Applications E. Higurashi Electrochemical Society	11 Conference Proceedings Applications of spin-on-glass for waveguide and micro-optical systems (Invited Paper) Moyer, P.J., Benrashid, R., Dupriez, P., Farahi, F. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Optical hybrid integration using planar lightwave circuit platform (Invited Paper) Hashimoto, T., Ogawa, I. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Etching of micro- and nano-structures in semiconductor and glass material systems (Invited Paper) Borek, G.T., Shafer, J.A., Simmons, L.R. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12