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Vertical-scanning profilometry having nanometric height resolution and scanning speed more than 40 μm/s

Author(s):
Adachi, M. ( Kanazawa Univ. (Japan) )  
Publication title:
Optomechatronic Sensors, Actuators, and Control
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5602
Pub. Year:
2004
Page(from):
73
Page(to):
82
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455550 [0819455555]
Language:
English
Call no.:
P63600/5602
Type:
Conference Proceedings

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