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850-nm vertical-cavity surface-emitting lasers fabricated by H+ inclined implantation using tungsten wire as mask

Author(s):
  • Du, G. ( Jilin Univ. (China) )
  • Wang, H. ( Jilin Univ. (China) )
  • Song, J. ( Jilin Univ. (China) )
  • Chang, Y. ( Jilin Univ. (China) and Dalian Univ. of Technology (China) )
Publication title:
Physics and Applications of Optoelectronic Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5594
Pub. Year:
2004
Page(from):
164
Page(to):
169
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455475 [0819455474]
Language:
English
Call no.:
P63600/5594
Type:
Conference Proceedings

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