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Characterization of sculptured thin films

Author(s):
Publication title:
Nanosensing: Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5593
Pub. date:
2004
Page(from):
643
Page(to):
649
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819455468 [0819455466]
Language:
English
Call no.:
P63600/5593
Type:
Conference Proceedings

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