New low-cost MEMS capacitive pressure sensor concept

New low-cost MEMS capacitive pressure sensor concept

Author(s):

Wang, Y. ( Rutgers Univ. (USA) )
Sheng, K. ( Rutgers Univ. (USA) )
Pai, C. -S. ( Lucent Technologies/Bell Labs. (USA) )

Publication title:

Nanofabrication: Technologies, Devices, and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5592

Pub. Year:

2005

Page(from):

313

Page(to):

319

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819455451 [0819455458]

Language:

English

Call no.:

P63600/5592

Type:

Conference Proceedings

Details

TDL ID:	ZA00014798
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Nanofabrication
Conf. info. (Number):	2004
Conf. info. (Venue):	Philadelphia, PA, USA
Conf. info. (Date):	2004.10.25-2004.10.28

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